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Posted by William Lai (203.66.245.250) on November 10, 2010 at 21:34:09:

We are interesting in your high resolution Spreading Resistance Analysis System and there are some questions as below:
1. If our sample is test wafer and desired depth is only 0.1um (of course, angles shallower than 400:1). How many points could we get by highest resolution? (1 point every 0.0017 microns?).
2. How much charge (including ultra-shallow technique surcharge) for this technical service?

Thanks for your reply in advance!


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