Posted by William Lai (188.8.131.52) on November 10, 2010 at 21:34:09:
We are interesting in your high resolution Spreading Resistance Analysis System and there are some questions as below:
1. If our sample is test wafer and desired depth is only 0.1um (of course, angles shallower than 400:1). How many points could we get by highest resolution? (1 point every 0.0017 microns?).
2. How much charge (including ultra-shallow technique surcharge) for this technical service?
Thanks for your reply in advance!