Re: Can you profile a sheer cross section ?


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Posted by Dan (66.122.81.186) on February 02, 2007 at 17:11:32:

In Reply to: Re: Can you profile a sheer cross section ? posted by Holin Chang on February 02, 2007 at 16:32:42:

: What is the limitation of bevel angle for profiling? Can I ask a angle of 25 degree that "magnifies" depth measurement to 2.3X? or some other angle?

I understand there are some bevel blocks that would allow for a 2.5:1 angle but we do not have any of them. Our steepest block is the 5:1. The next step would be perpendicular. For your 100um depth you would actually need something a little steeper than 45 degrees. Or you will need to find larger areas in which to run the profiles


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