Posted by Les Szepesi (63.135.212.115) on July 03, 2012 at 12:38:03:
I know you don't like having nitride passivation on the SRA samples, but is oxynitride a problem? I'm designing some test structures for SRA, but I'm afraid there won't be adequate selectivity between the oxynitride and underlying oxides and we'd either break through to the silicon and possibly erode the silicon or we'd make the physical definition of the SRA boxes degraded as they will be defined by variations in oxide thickness.