Dopant concentration

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Posted by JACK (123.124.23.226) on January 10, 2011 at 23:37:37:

In Reply to: Re: Dopant concentration posted by Dan on February 09, 2010 at 17:32:25:

: : : How can I find the dopant concentration of Phosphorus in Silicon?

i use gas of Silane and Phosphine using PECVD if i use
SiH4 (5% diluted in H2) with 20 SCCM as silane flow rate and PH3 (0.5% diluted in H2)2SCCm as phosphine flow rate
i want to know the PH3/SiH4=?? how to calculate it in % and can it be converted in Cm^-3?? pleas help and show me the formula that can handle this problem.

i will be thankful for your help.

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Comments: : : : : How can I find the dopant concentration of Phosphorus in Silicon? : i use gas of Silane and Phosphine using PECVD if i use : SiH4 (5% diluted in H2) with 20 SCCM as silane flow rate and PH3 (0.5% diluted in H2)2SCCm as phosphine flow rate : i want to know the PH3/SiH4=?? how to calculate it in % and can it be converted in Cm^-3?? pleas help and show me the formula that can handle this problem. : i will be thankful for your help. :

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