Posted by Dan (66.122.81.186) on February 02, 2007 at 17:11:32:
In Reply to: Re: Can you profile a sheer cross section ? posted by Holin Chang on February 02, 2007 at 16:32:42:
: What is the limitation of bevel angle for profiling? Can I ask a angle of 25 degree that "magnifies" depth measurement to 2.3X? or some other angle?
I understand there are some bevel blocks that would allow for a 2.5:1 angle but we do not have any of them. Our steepest block is the 5:1. The next step would be perpendicular. For your 100um depth you would actually need something a little steeper than 45 degrees. Or you will need to find larger areas in which to run the profiles