resisitivity limits

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Posted by Andrei (193.18.92.131) on November 22, 2006 at 14:34:38:

Thank you for adding this bulletin board to your web site. I wonder if SRP has limitations for measuring high resistivity substrates. I am particularly interested in accurate measurements of resistivity of float zone silicon with resistivity over 1000 Ohm-cm (which corresponds to the doping levels below 1e13 cm-3). Will the SRP technique work at all on such wafers, can one expect higher error margins? Can you estimate the error - 1%? 10%? 100%?

Thanks!

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Comments: : Thank you for adding this bulletin board to your web site. I wonder if SRP has limitations for measuring high resistivity substrates. I am particularly interested in accurate measurements of resistivity of float zone silicon with resistivity over 1000 Ohm-cm (which corresponds to the doping levels below 1e13 cm-3). Will the SRP technique work at all on such wafers, can one expect higher error margins? Can you estimate the error - 1%? 10%? 100%? : Thanks!

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