Resources

Technical Notes

download Concerning the Measurement of P-well and N-well Surfaces

Converting Resistivity to Carrier Concentration – JavaScript Calculator

download Converting Resistivity to Carrier Concentration – Graph

Depth Resolution – JavaScript Calculator

download The Desirability of Dedicated Spreading Resistance Test Patterns

download SRA Tutorial: Determination of Diffusion Characteristics Using 2&4 Point Probe Measurements

download Doping Type Determination

download Dose, Sheet and 4 Point Probe

download Electrically Active and Inactive Phosphorus – a SRA and SIMS comparison

download Epi Resistivity as an Indication of Silane Purity

download Gallery of Four Point Probe Measurements

download How Big a Pattern Do We Need For SRA?

download How Do We Calculate Carrier Concentration?

download Maximum Depth of Interest and Related Matters

download Profiling Poly

download SRP and SIMS

download Profiling Rough Surfaces

download Sampling Volume Correction

Webinars

download An Introduction to Spreading Resistance Analysis and its Application in the Semiconductor Industry

Published Papers

download Geometric Effects Contributing to Anticipation of the Bevel Edge in Spreading Resistance Profiling (© Solecon Labs 1995)

download Developments in Ultra-shallow SRA  (© AVS 2002). We encourage you to support JVST by buying a copy of this paper here.