Posted by Dan (126.96.36.199) on May 23, 2017 at 15:27:29:
In Reply to: SRP for III-V posted by Mike on May 23, 2017 at 04:47:52:
: Is this technique suitable for compound semiconductors?
SRP can be used on some III-V materials but not all. And we can only provide measured resistances vs depth as we have no calibration material to establish a resistivity. So what work we have done has been to compare 2 samples, typically good and bad, to look at what might be different between them.
: We are diffusing Zn into InP and would like to verify our ECV results. Has this been attempted before?
I don't know if we have been successful in profiling InP with Zn doping. I do know that we have had problems with most InP as we usually get overrange resistances. We just can't get measurable resistances! (The same holds true for any compound with N like GaN)
If you wish to send a sample in we would try to see if measurements are feasible. If they are, we would still only be able to provide spreading resistances, not resistivity or carrier concentration.