Re: SRP for III-V

[ Follow Ups ] [ Post Followup ] [ Solecon Labs BBS ] [ FAQ ]

Posted by Dan ( on May 23, 2017 at 15:27:29:

In Reply to: SRP for III-V posted by Mike on May 23, 2017 at 04:47:52:

: Is this technique suitable for compound semiconductors?

SRP can be used on some III-V materials but not all. And we can only provide measured resistances vs depth as we have no calibration material to establish a resistivity. So what work we have done has been to compare 2 samples, typically good and bad, to look at what might be different between them.

: We are diffusing Zn into InP and would like to verify our ECV results. Has this been attempted before?

I don't know if we have been successful in profiling InP with Zn doping. I do know that we have had problems with most InP as we usually get overrange resistances. We just can't get measurable resistances! (The same holds true for any compound with N like GaN)

If you wish to send a sample in we would try to see if measurements are feasible. If they are, we would still only be able to provide spreading resistances, not resistivity or carrier concentration.


Follow Ups:

Post A Followup
[ Follow Ups ] [ Post Followup ] [ Solecon Labs BBS ] [ FAQ ]