Re: Beveling at a variety of angles


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Posted by Dan (12.22.5.210) on October 13, 2016 at 15:56:51:

In Reply to: Beveling at a variety of angles posted by Doug Young on October 13, 2016 at 14:28:19:

: Are you able to bevel in a variety of rotational angles on 1-0-0 silicon wafers? We would like to look at the dopant profile of test structures that are laid out at a variety of angles on the wafer.

We are able to bevel into samples from pretty much any direction, not just the normal 4 planes of top, bottom, left and right. For example, we often bevel into square patterns diagonally to increase the usable length. Or because patterns have been placed with a 45 degree offset.


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