Posted by Dan (220.127.116.11) on October 13, 2016 at 15:56:51:
In Reply to: Beveling at a variety of angles posted by Doug Young on October 13, 2016 at 14:28:19:
: Are you able to bevel in a variety of rotational angles on 1-0-0 silicon wafers? We would like to look at the dopant profile of test structures that are laid out at a variety of angles on the wafer.
We are able to bevel into samples from pretty much any direction, not just the normal 4 planes of top, bottom, left and right. For example, we often bevel into square patterns diagonally to increase the usable length. Or because patterns have been placed with a 45 degree offset.