surface finish

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Posted by Anna ( on June 01, 2012 at 05:49:23:

I'm a designer and I also perform srp measurements. I have samples with N epi growth on a N-type substrate which should have resistivity = 1 mohm*cm. I have obtained a high noisy profile at the substrate. I have measured a substrate resistivity higher or equal to 2 mOhm*cm and by reapeating the measurements I have understood that the problem is the surface finish! That is, I believe for low resistance values the surface finish is very important and can lead to totally wrong results. Based on your experience do you think I'm right? If yes, how can I control the surface finish to obtain a reliable resistance value? Thank you for your kind help.

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