Posted by JACK (220.127.116.11) on January 10, 2011 at 23:37:37:
In Reply to: Re: Dopant concentration posted by Dan on February 09, 2010 at 17:32:25:
: : : How can I find the dopant concentration of Phosphorus in Silicon?
i use gas of Silane and Phosphine using PECVD if i use
SiH4 (5% diluted in H2) with 20 SCCM as silane flow rate and PH3 (0.5% diluted in H2)2SCCm as phosphine flow rate
i want to know the PH3/SiH4=?? how to calculate it in % and can it be converted in Cm^-3?? pleas help and show me the formula that can handle this problem.
i will be thankful for your help.