Posted by Roger Brennan (220.127.116.11) on December 23, 2010 at 18:41:38:
In Reply to: Re: SIMS VS. SRP posted by Dan Ron on December 23, 2010 at 09:17:47:
: How can i get the atomic concentration (atoms/cm^3) from SRP profile?
In single crystal, (i.e. good carrier mobility), SRP calculates a value equal to the net electrically active atomic concentration exclusive of space-charge (depletion) regions. To put it another way, there is often nearly a 1:1 ratio between carrier concentration and atomic (dopant) concentration. Exceptions are electrical junctions, poly, unannealed implants, and VERY high dopant concentrations. One thought to keep in mind is the carrier concentration (SRP) almost exclusively controls the device performance.