Re: Dopant concentration

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Posted by Dan ( on February 09, 2010 at 16:24:34:

In Reply to: Re: Dopant concentration posted by Wallace Chalmers on February 09, 2010 at 12:04:26:

: Hello Dan,

: Thanks for this calculator. One question, I noticed that the thickness parameter was not needed. How is the carrier concentration derive?

Hello Wallace,

The calculator uses resistivity in ohm-cm, not sheet resistance in ohms/sq. Sheet resistance can be converted to resistivity if you know the thickness. Sheet resistance cannot be used to determine carrier concentration.

To calculate carrier concentration values from resistivities, we use carrier mobility values
derived from Thurber, Mattis, Liu, and Filliben, National Bureau of Standards Special Publication 400-64, The Relationship Between Resistivity and Dopant Density for
Phosphorus-and Boron-Doped Silicon
(May 1981), Table 10, Page 34 and Table 14, Page 40.

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