Posted by Roger Brennan (220.127.116.11) on January 29, 2010 at 19:36:30:
In Reply to: Re: SIMS VS. SRP posted by Paul Rainey on January 29, 2010 at 18:28:16:
For silicon, we have 64 NIST standards for calibration. Nothing that elegant exists for Ge but we do muddle through.
Ge is softer than Si so that we worry about probe tip penetration. (Still, we have charaterized juntions thought to be 50nm.)
At junctions, we see higher cusps in the measured resistance with silicon than with Ge.
Having said all of that, we still produce useful profiles into Ge.
Germanium seems to be enjoying a renaissance. When I joined TI in 1965, they were shutting down Ge operations and expanding Si. Now, we see a growing interest.
: Dear Roger
: If possible could you elaborate on one comment in the last post:
: "SRP is quite good for profiling silicon, somewhat less for germanium"
: I'm a silicon guy who started working on germanium a couple of years ago - still learning every day(!) - and am very interested in your experiences with Ge
: thank you