Posted by Dan (188.8.131.52) on September 03, 2007 at 13:38:47:
In Reply to: SRP profile for Boron on Phosphorus posted by Santosh Sharma on August 24, 2007 at 14:42:39:
: I have 300x300um implant pads in a product wafer that I want SRPs done. Will it be OK to do an SRP on those?
Yes we can do profiles on 300um square patterns.
Please see the depth resolution technical note on our Technical Information page for details on what resolutions we'd be able to provide based on your depths of interest.