Posted by Holin Chang (184.108.40.206) on January 30, 2007 at 22:29:19:
Can you profile a sheer cross section of the designated location? We like to know the doping profile of a device with multi layers of different doping in about 100um square. and the layers thickness is totally 100um. A beveling cross section is hard to cover all these layers.
We can provide the sheer cross section sample.